ALD製程暨設備發展組

Kei, Chi-Chung
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Research Fellow & Division Director

03-5779911#585

g893552  tiri.narl.org.tw

Preparation of organic and oxide nanowires by using vapor phase methods. Preparation of oxide nano honeycombs by using solution-based nanosphere lithography. Fabrication and characterization of gold and gold-silver nanoparticle array. Design and process development of chemical beam epitaxy. Design and process development of atomic layer deposition.

Lee, Chao-Te
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Research Fellow

03-5779911#643 #623

tigerlee  tiri.narl.org.tw

1.Design sputtering system and improve the process, 2.Nanomaterial, 3.Magnetic film

Cho, Wen-Hao
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Associate Researcher

03-5779911#641

kesikar  tiri.narl.org.tw

1.Optical Thin Film, 2.Atomic Layer Deposition

Liou, Bo-Heng
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Associate Researcher

03-5779911#640

jazerox  tiri.narl.org.tw

1.Magnetron sputtering, 2.Plasma enhand atom layer deposition

Yu, Yu-Hsuan
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Assistant Engineer

03-5779911#659

ysyu  tiri.narl.org.tw

1.Atomic layer deposition(ALD), 2.Developing and assembling of semiconductor system, 3.Developing of chemical synthesis process, 4.Laboratory equipment operation

Daniel Chen
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Assistant Researcher

03-5779911#614

1509777  tiri.narl.org.tw

1.Nanoscale biosensor process, 2.Semiconductor process intergration, 3.Atomic layer deposition process

Chang, Chan-Yuen
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Assistant Researcher

03-5779911#651

1809912  tiri.narl.org.tw

1.Designing and Processing Atomic Layer Deposition system, 2.Surface and Interface Science

Lin, Yu-Chiao
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Assistant Researcher

03-5779911#666

1809924  tiri.narl.org.tw

Atomic Layer Deposition

Yang, Cheng-Ye
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Research Assistant

03-5779911#339

1509780  tiri.narl.org.tw

LabVIEW Program Development Mechanical Design

Panda Chen
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Engineering Assistant

03-5779911#421

1609788  tiri.narl.org.tw

1. Mechanism Design

Narmatha Koothan
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Research Assistant

03-5779911#228

1809937  tiri.narl.org.tw

1. Process development of new semiconductor materials thin films by atomic layer deposition., 2. Preparation of thin films by sol-gel method.

Gugu Cheng
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03-5779911#538

1409735  tiri.narl.org.tw

Project management.