ALD Process and Equipment Development Division
| Name | Position | Contact | Profession |
|---|---|---|---|
| Kei, Chi-Chung | Research Fellow & Division Director |
03-5779911#585 g893552 narlabs.org.tw |
Preparation of organic and oxide nanowires by using vapor phase methods、Preparation of oxide nano honeycombs by using solution-based nanosphere lithography、Fabrication and characterization of gold and gold-silver nanoparticle array、Design and process development of chemical beam epitaxy、Design and process development of atomic layer deposition |
| Cho, Wen-Hao | Associate Researcher |
03-5779911#641 kesikar narlabs.org.tw |
Optical Thin Film、Atomic Layer Deposition |
| Liou, Bo-Heng | Associate Researcher |
03-5779911#640 jazerox narlabs.org.tw |
Magnetron sputtering、Plasma enhand atom layer deposition |
| Yu, Yu-Hsuan | Assistant Engineer |
03-5779911#659 ysyu narlabs.org.tw |
Atomic layer deposition(ALD)、Developing and assembling of semiconductor system、Developing of chemical synthesis process、Laboratory equipment operation |
| Daniel Chen | Assistant Researcher |
03-5779911#614 1509777 narlabs.org.tw |
Nanoscale biosensor process、Semiconductor process intergration、Atomic layer deposition process |
| Panda Chen | Assistant Engineer |
03-5779911#421 1609788 narlabs.org.tw |
Mechanism Design |
| Chang, Chan-Yuen | Assistant Researcher |
03-5779911#651 1809912 narlabs.org.tw |
Designing and Processing Atomic Layer Deposition system、Surface and Interface Science |
| Assistant Researcher |
03-5779911#478 2209226 narlabs.org.tw |
||
| Research Assistant |
03-5779911#674 2209235 narlabs.org.tw |
